TS200-THZ
MPI
TS200-THZ
200mm Manual System for mmW and THz Application
Price on Request
Product specifications
| SKU | MPI-TS200-THZ |
|---|---|
| Manufacturer | MPI |
Documentation
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Description
MPI TS200–THZ probe system expand MPI one-of-a-kind system solutions for emerging THz applications by adding active impedance tuner integrations on the same probe stations. It’s the industry’s first explicitly designed 150 mm and 200 mm probe systems providing accurate tests for the combination of requirements for mm-wave, THz, and automated impedance tuner applications with best possible measurement directivity.
Key benefits
Microscope and Optics
- Single tube MPI SZ12, MZ12
- Up to 12x zoom and 90 mm working distance
- Down to 1.68 μm resolution
- HDMI cameras, monitor user interface without computer
Microscope Mount and Movement
- Stable bridge for high quality optics
- 50 x 50 mm or 80 x 80 linear XY movement
- 90° tilt for easy reconfiguration
Probe Platen
- 4-Port Bridge for DC biasing or 4-port RF
- Designed especially to accommodate large positioners for mmW and THz applications
- Rectangular adjustments for RF positioners
Unique Platen Lift
- Three discrete positions for contact, separation (300 μm) and safety loading 3 mm
- Safety lock function in the upper position
- “Auto Contact“ position with 1 μm repeatability
- Additional stop at 50, 100 or 150 μm alignment height
Small Footprint
- Designed for bench top use
- Vibration damping base included
- Low profile design for maximum usability
- Ideal for mmW, THz and load pull applications
MicroPositioners
- Unique over-travel control option
- MP80-DX option for accurate multi-line TRL calibration
- Supports two bolt down large area MP80 MicroPositioners
Automated Impedance Tuner Integrations
- To achieve optimum tuning range & highest gamma
Further Options
- Vibration Insolation Table
- Monitor stands
- Instrument shelf
Frequency Extender Integration Modules
- Dovetail interface for for easy setup and switching between different frequency bands
- Integration close to the DUT for broadband applications with direct mount of the WG probes, no S-bend is required
- No chuck elevation required to provide maximum mmW measurement stability
- Options for waveguide and coax application
- Universal large area platforms for integrating various frequency extenders up to 1.1 THz
- Micrometer screws for fine leveling of the waveguide probe on the platforms
Modular Chucks
- Dedicated RF or mmW designs
- Field upgradable for reduced cost of ownership
- Easy switch between center and small wafer size control
Chuck XYZ Stage Movement
- Fine chuck Chuck XY stage with total travel range of 255 x 325 mm for easy loading
- Unique puck controlled air bearing stage movement with 25 x 25 mm of XY travel and < 1.0 μm resolution
- Chuck theta rotation of 360° with +/-5° fine micrometer travel
- Chuck Z movement of 10 mm with fine travel resolution of 1.0 μm including digital indicator for accurate overtravel setting
- Safe contact feature locking the XY Air-bearing stage while in contact
- Independent locking option of the X or Y axis
- Large vacuum base for maximum stability
Front Mounted Vacuum Control
- Easy access
- Clearly marked
RF Calibration
- 2 auxiliary chucks for calibration substrates
- Built-in ceramic for accurate calibration
- 1 μm flatness for consistent contact quality
- QAlibria® - MPI RF Calibration Software
ThermoShieldTM
- Full size 200 mm with ThermoShield™
- 25mm thermal chuck for testing single ICs