TS200-HP
MPI
TS200-HP
200mm Manual High Power System
Price on Request
Product specifications
| SKU | MPI-TS200-HP |
|---|---|
| Manufacturer | MPI |
Documentation
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Description
MPI High-Power device characterization systems are specifically designed for on-wafer high power device testing. TS200-HP probe systems provide a complete 150 mm and 200 mm on-wafer solution. They are engineered to achieve low contact resistance measurements of power semiconductor under wide range of temperatures.
Key benefits
Light Curtain
- Interlock-enabled safety light curtain protects users from accidental high voltage shock
- Interface panel for Keysight B1505A & Keithley instrumentation
Anti-Arcing Technologies
- ArcShieldTM to prevent arcing between chuck and probe platen
- LiquidTrayTM to safely place the wafer for high voltage test in arcing suppressing liquid
MicroPositioners
- Supports up to 4 high current and 8 high voltage positioners
- Various positioners available
- Dedicated Coax and Triax high voltage and high current probe arms
Probe Platen
- Fine adjustment of platen height up to 20 mm, with 1 mm scale
- Supports DC/CV, RF and High Power measurements
- Rectangular adjustments for RF MicroPositioners
- Integrated probe platen air-cooling for maximum thermal stability
Unique Platen Lift
- Three discrete positions for contact, 300 μm separation and 3 mm safety loading
- Safety lock function at loading position
- “Auto Contact“ position with 1 μm repeatability
- Additional stop at 50, 100 or 150 μm alignment height
ShielDEnvironment™
- Advanced EMI and light-tight shielded test environment for ultra-low noise, low capacitance measurements
- Front door for manual loading of IC or wafers ShielDCap™
- Automated front door lock function for safe ice-free testing
Front Mounted Vacuum Control
- Easy access and clearly marked
- Integrated active vibration isolation table
High Power Probes
- High voltage, low leakage probes up to 10 kV
- High current, multi-fingers probes up to 200 A (pulse)
- Ultra high power, multi-fingers probes up to 10 kV/600 A (pulse)
Microscope Mount and Movement
- Stable bridge for high quality optics
- 50 x 50 mm linear XY movement
- Linear z lift for easy reconfiguration
Microscope and Optics
- Single tube MPI SZ12, MZ12
- Up to 12x zoom and 101 mm working distance
- HDMI cameras, monitor user interface without computer
Modular Chucks
- Various High Power non-thermal or thermal chucks
- Wide range of temperature from -60 °C up to 300 °C
- Field upgradable for reduced cost of ownership
- Thin wafer handling capability
- 10 kV (Coax), 3kV (Triax)
- Gold plated for low contact resistance
- MPI 10kV chuck connectors for safe instrument connection
- Re-use chuck cooling air for chamber purge
Chuck XYZ Stage Movement
- Unique puck-controlled air bearing stage for chuck singlehanded operation
- 225 x 260 mm XY total stage movement
- 25 x 25 mm XY fine micrometer adjustment
- Resolution < 1.0 μm (0.04 mils) @ 500 μm/rev
- Chuck theta rotation of 360° with +/-5° fine travel
- Safe contact function locks the XY stage while in contact
- 20 mm pneumatically Z load stroke,
- 5 mm fine Z, resolution < 1.0 μm @ 500 μm/rev
- Extra wide Y-range for easy wafer loading
- Optional independent lock of the X or Y axis
Safety Test ManagementTM (STM) System
- Provides unique safety, reliable and convenient environment for testing at different temperatures
- Intelligent dew point control routine avoids acumination during cold testing
- Automatically monitoring the flow of CDA or Nitrogen
- If the flow is interrupt or insufficient the STMTM turns the chuck automatically into safe mode
Anti-arcing probe card
- High pressure application for testing up to 10 kV/600A
- Temperature testing up to 150 °C