TS200
MPI
TS200
200mm Standard Manual System
Price on Request
Product specifications
| SKU | MPI-TS200 |
|---|---|
| Manufacturer | MPI |
Documentation
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Description
MPI TS200 manual probe systems are open, easy to use and cost effective yet highly accurate. These systems are designed for precision analysis of substrates and wafers up to 200mm.
They may be configured to support a wide variety of applications such as Failure Analysis , Design Validation/IC Engineering , Wafer Level Reliability, High Power, Device Characterization, MEMS and Signal Integrity as well.
Key benefits
Microscope Mount and Movement
- Stable bridge for high quality optics
- Linear Z lift for easy reconfiguration
- 25 x 25 mm air bearing or 50 x 50 mm linear XY movement
Adjustable Platen Height
- Micrometer control for precise adjustment
- 20 mm range for various applications
Probe Platen
- Stable and rigid design
- Supports DC/CV and RF measurements
- Rectangular adjustments for RF positioners
- Designed for maximum thermal stability
Unique Platen Lift
- Three discrete positions for contact, separation (300 μm) and safety loading (3 mm)
- Safety lock function at loading position
- “Auto Contact“ position with ±1 μm repeatability for consistent contact quality
RF Calibration
- 2 auxiliary chucks for calibration substrates
- Built-in ceramic for accurate calibration
- 1 μm flatness for consistent contact quality
Small Footprint
- Designed for bench top use
- Comes with vibration absorber base
- Low profile design for maximum usability
Microscope and Optics Options
- Various optics options available
- Stereo MPI ST45 or single tube MPI SZ10, MZ12 with up to 12x zoom and 95 mm working distance
- High Power microscopes FS70/PSM-1000
- HDMI cameras, monitor user interface without computer
Thermal Chuck Integration
- Seamless integration of the thermal controller touch screen panel provides most convenient operation
Modular Chucks
- Various non-thermal or thermal chucks
- Choice of Triaxial or Coaxial connection
- Wide range of temperature up to 300 °C
- Field upgradable for reduced cost of ownership
- Easy switch between center and small wafer size control
DC and RF Positioners
- Supports up to 4 RF and 10 DC positioners
- Wide range of positioners available
- Dedicated probe arms for DC/CV and RF measurements
Chuck XY-Theta Stage Movement
- Unique puck controlled air bearing stage for quick single-handed operation
- 240 x 315 mm XY total stage movement
- Including 25 x 25 mm fine micrometer control
- Resolution < 1.0 μm (0.04 mils) @ 500 μm/rev
- Extra wide Y-range for easy loading
- ±5° Theta fine adjustment
Front Mounted Vacuum Control
- Easy access
- Clearly marked