TS150-THZ
MPI
TS150-THZ
150mm Manual System for mmW and THz Application
Price on Request
Product specifications
| SKU | MPI-TS150-THZ |
|---|---|
| Manufacturer | MPI |
Documentation
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Description
MPI TS150–THZ engineering probe system is a dedicated, cost effective, manual probe system designed especially for precision analysis of substrates and 150 mm wafers in sub THz range. The system is extremely stable, with a large probe platen, and a low-profile design. Each of these essential elements are required to support a wide variety of RF and mmW applications such as broadband up to 220 GHz, banded solutions up to 1.1THz, load-pull and RF noise.
Key benefits
Microscope Mount and Movement
- Stable bridge for high quality optics
- 90° tilt for easy reconfiguration
- 50 x 50 mm linear XY movement
4-Port Bridge
- Two: in North and South
- Rectangular adjustments for RF positioners
- Designed as standard feature for DC biasing or 4-port RF
- For single DC or RF MicroPositioners
MicroPositioners
- Unique over-travel control option
- MP80-DX option for accurate multi-line TRL calibration
- Supports max. 2 bold down large area MP80 MicroPositioners
Probe Platen
- Single large probe platen in rigid design
- 4 probe platen supports for max. stability
- Designed especially to accomodate large positioners for mmW and THz applications
Unique Platen Lift
- Three discrete positions for contact, separation (300 μm) and safety loading 3 mm
- Safety lock function at loading position
- “Auto Contact“ position with ±1 μm repeatability for consistent contact quality
Small Footprint
- Designed for bench top use
- Comes with vibration absorber base
- Low profile design for maximum usability
- Ideal for mmW, THz and load pull applications
Front Mounted Vacuum Control
- Easy access
- Clearly marked
Microscope and Optics Options
- Various optics options available
- Single tube MPI SZ10, MZ12 with up to 12x zoom and 95 mm working distance
- HDMI cameras, monitor user interface without computer
Modular Chucks
- Non-thermal or hot only chucks
- Dedicated RF or mmW designs
- Field upgradable for reduced cost of ownership
- Easy switch between center and small wafer size control
RF Calibration
- 2 auxiliary chucks for calibration substrates
- Built-in ceramic for accurate calibration
- 1 μm flatness for consistent contact quality
MP80 Integration Modules
- 2 options for waveguide or coax application
- Universal large area platforms for integrating various frequency extenders up to 1.1 THz
- Micrometer screws for fine waveguide probe leveling on the platforms
- Dove-tail interface for dedicated adaptations for easy setup and switching between different frequency bands
Chuck XYZ Stage Movement
- Unique puck controlled air bearing stage for quick single-handed operation
- Large vacuum base for max. stability
- 180 x 300 mm XY total stage movement
- Resolution < 1.0 μm (0.04 mils) @ 500 μm/rev
- 25 x 25 mm micrometer fine XY adjustment
- 10 mm fine Z, resolution < 1.0 μm (0.04 mils) @ 500 μm/rev, with digital indicator
- ±5° Theta fine adjustment
- Extra wide Y-range for easy loading