Description Features High speed – up to 300 cm²/s Maximum accuracy – up to 3 µm Repeatability: grey values ± 1 μm @ 4 sigma, for each channel Innovative patented light technology Intelligent algorithms preventing pseudo error occurrences NEW: All-Multilayer-Scan: multi-layer printing in one single inspection operation (all layers are inspected) NEW: Layout correction via Correction Fiducials NEW: High Speed Option: Extended multi-camera system e.g. 3 µm resolution with 2 cameras >> 25 cm²/s