ITS150-HP

TS150 Manual Test System with puck controlled air-bearing stage
• For high power application up to 10 kV / 600 A
• 180 x 230 mm (7.1 x 9.1 in) XY total stage movement
• 25 x 25 mm micrometer fine stage movement
• ±5 degree fine chuck Theta rotation
• Probe platen ArcShield™ for High Voltage measurements
• Platen lift w/ discrete contact, separation (300 μm) and loading (3 mm) positions for ease of use, safety lock function at loading position
• Dedicated 20 mm fine platen height adjustment
• Stable microscope bridge mount
• Vibration absorbing base
• Integrated service loop for stable XY stage movement
• Include TB900 table, dark box, and interlock for safety operation

150 mm Coax Chuck, non-thermal
• Stainless steel chuck top with vacuum rills
• BNC (female) chuck connection
• 2 m coaxial cable male-male BNC

Air-Bearing Microscope Movement / 25x25 mm
• Precision 25 mm x 25 mm X-Y microscope transport
• Very easy to operate, vacuum fixation with convenient On-Off switch
• 90 degree tilt for easy and safety probe replacement or reconfiguration
• 50mm focus block

ST45 Stereo Microscope with 6.7:1 zoom ratio
• Set of 25x eyepieces for optimal magnification
• Working distance 100 mm, C-mount adapter
• 72 LED ring illumination, four-zone selectable, external remote control
• 100-240V AC, CE

Options depending on the desired application:
• MicroPositioners MP25 for HV probe arms and MP40 with RF probe arms for HC and HP probes
• Probe arms and probes
• Chuck upgrades to HP-Triax and thermal HP-Chucks

Accessories, wafer tweezers, L-key set